Simultaneous Depth Profiling of the 12 C and 13 C Elements in Different Samples Using (d,p) Reactions

Nuclear reactions (d,p) are often used to perform depth profiling of light elements in solids. In particular, protons coming from C(d,p0) C and C(d,p0) C reactions are emitted at very different energies. Consequently these two reactions can be used to depth profile C and C simultaneously. Nevertheless the cross section of C(d,p0) C reaction is ten times smaller than the C(d,p0) C one. So, the geometry of detection must be judiciously chosen in order to depth profile these two elements with a high sensitivity and good resolution. In the framework of this study we have performed 400 keV C ions implantation into polished copper substrates at different temperatures and implanted doses with a 2 MV Tandem accelerator. Using the reactions described above, we have studied the evolution of C depth profile as a function of implanted doses and temperature. We have also determined the origine of surface contamination that appears during the implantation process. PACS : 25.45.De, 29.30.Ep